PIEZOELECTRIC ACOUSTIC MEMS TRANSDUCER AND FABRICATION METHOD THEREOF
A piezoelectric MEMS transducer (20), formed in a body (21) of semiconductor material, has a central axis (S) and a peripheral area (30A), and comprises a plurality of beams (39), transverse to the central axis, each beam having a first end (41), coupled to the peripheral area of the body, and a sec...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A piezoelectric MEMS transducer (20), formed in a body (21) of semiconductor material, has a central axis (S) and a peripheral area (30A), and comprises a plurality of beams (39), transverse to the central axis, each beam having a first end (41), coupled to the peripheral area of the body, and a second end (42), facing the central axis; a membrane (32), transverse to the central axis and arranged underneath the beams; a pillar (34), parallel to the central axis and rigidly connected to the second ends of the beams and to the membrane; and a plurality of piezoelectric sensing elements (50) arranged on the beams. |
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