MONITORING THE BEARING ASSEMBLY OF A VACUUM PUMP

To provide a vacuum pump configured to early detect imminent damage, ideally before the vacuum pump actually fails.SOLUTION: The present invention relates to a vacuum pump, in particular a turbo molecular pump, comprising: at least one pumping stage having at least one rotor which is rotatably suppo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Böttcher, Jochen, Stoll, Tobias, Schweighöfer, Michael, Schnarr, Johannes
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	To provide a vacuum pump configured to early detect imminent damage, ideally before the vacuum pump actually fails.SOLUTION: The present invention relates to a vacuum pump, in particular a turbo molecular pump, comprising: at least one pumping stage having at least one rotor which is rotatably supported by at least one bearing device; a first sensor device arranged adjacent to the bearing device and capable of determining an operation parameter of the bearing device; and a second sensor device arranged adjacent to the bearing device and capable of determining an operation parameter of the vacuum pump, in particular an operation parameter of a housing of the vacuum pump, the vacuum pump being characterized by further including a control device that compares the operation parameter of the bearing device and the operation parameter of the vacuum device and determines the operation state of the bearing device on the basis of the comparison result. The invention also relates to a method of operating the vacuum pump.SELECTED DRAWING: Figure 6