VAPOR DEPOSITION MASK DEVICE AND METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK DEVICE

A vapor deposition mask device capable of suppressing the occurrence of wrinkles and deformation in a vapor deposition mask, and a method of manufacturing the vapor deposition mask device are provided.A vapor deposition mask device (10) includes a vapor deposition mask (20) having an effective regio...

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Bibliographische Detailangaben
Hauptverfasser:	OKAMOTO, Hideyuki, NAKAMURA, Yusuke, USHIKUSA, Masato
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A vapor deposition mask device capable of suppressing the occurrence of wrinkles and deformation in a vapor deposition mask, and a method of manufacturing the vapor deposition mask device are provided.A vapor deposition mask device (10) includes a vapor deposition mask (20) having an effective region (22) in which a plurality of first through holes (25) is disposed, and a frame (15) attached to the vapor deposition mask (20). The vapor deposition mask device (10) includes a plurality of joint portions (60) that joins the vapor deposition mask (20) and the frame (15) to each other. The plurality of joint portions (60) is arranged along the outer edge (26) of the vapor deposition mask (20). A notch (42) is formed at a position corresponding tos between two adjacent joint portions (60) in the outer edge (26) of the vapor deposition mask (20).