A METHOD OF MANUFACTURING RADIO FREQUENCY (RF) COIL MULTI-DRIVER RF BASED ION SOURCE

A METHOD OF MANUFACTURING RADIO FREQUENCY (RF) COIL MULTI-DRIVER RF BASED ION SOURCE

The invention relates to a method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source, the method comprising the steps of: (a) manufacturing a tube using stainless steel grade as a substrate material; (b) coating the tube; and (c) joining a plurality of coils produced...

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Hauptverfasser: PATEL, Milind Kumar, GAHLAUT, Agrajit, CHAKRABORTY, Arun Kumar, JOSHI, Jaydeep, PARMAR, Deepak Kumar, BANDYOPADHYAY, Mainak, Rotti, Chandramouli, MUVVALA, Venkata Nagaraju
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
CABLES
CONDUCTORS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INDUCTANCES
INSULATORS
MAGNETS
SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
TRANSFORMERS
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creator PATEL, Milind Kumar
GAHLAUT, Agrajit
CHAKRABORTY, Arun Kumar
JOSHI, Jaydeep
PARMAR, Deepak Kumar
BANDYOPADHYAY, Mainak
Rotti, Chandramouli
MUVVALA, Venkata Nagaraju
description The invention relates to a method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source, the method comprising the steps of: (a) manufacturing a tube using stainless steel grade as a substrate material; (b) coating the tube; and (c) joining a plurality of coils produced by step (a) and step (b) by orbital TIG welding process.
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subjects BASIC ELECTRIC ELEMENTS
CABLES
CONDUCTORS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INDUCTANCES
INSULATORS
MAGNETS
SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
TRANSFORMERS
title A METHOD OF MANUFACTURING RADIO FREQUENCY (RF) COIL MULTI-DRIVER RF BASED ION SOURCE
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