A METHOD OF MANUFACTURING RADIO FREQUENCY (RF) COIL MULTI-DRIVER RF BASED ION SOURCE

The invention relates to a method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source, the method comprising the steps of: (a) manufacturing a tube using stainless steel grade as a substrate material; (b) coating the tube; and (c) joining a plurality of coils produced...

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Bibliographische Detailangaben
Hauptverfasser:	PATEL, Milind Kumar, GAHLAUT, Agrajit, CHAKRABORTY, Arun Kumar, JOSHI, Jaydeep, PARMAR, Deepak Kumar, BANDYOPADHYAY, Mainak, Rotti, Chandramouli, MUVVALA, Venkata Nagaraju
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CABLES CONDUCTORS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INDUCTANCES INSULATORS MAGNETS SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES TRANSFORMERS
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Beschreibung
Zusammenfassung:	The invention relates to a method of manufacturing Radio Frequency (RF) coil for multi-driven RF based-ve Ion source, the method comprising the steps of: (a) manufacturing a tube using stainless steel grade as a substrate material; (b) coating the tube; and (c) joining a plurality of coils produced by step (a) and step (b) by orbital TIG welding process.