MICRON SCALE HEATING STAGE

A sub-micron scale nanomechanical property testing apparatus includes a test subject holder (55). The test subject holder (55) includes a base interface (53) configured to couple with a holder base (54) of a sub-micron nanomechanical property testing instrument and electro-mechanical transducer (32)...

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Bibliographische Detailangaben
Hauptverfasser: Oh, Yunje, Cyrankowski, Edward, Asif, Syed Amanulla Syed, Warren, Oden, L
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A sub-micron scale nanomechanical property testing apparatus includes a test subject holder (55). The test subject holder (55) includes a base interface (53) configured to couple with a holder base (54) of a sub-micron nanomechanical property testing instrument and electro-mechanical transducer (32) assembly. The test subject holder (55) further includes a test subject stage (110) coupled with the base interface (53). The test subject stage (110) is thermally isolated from the base interface (53). The test subject stage (110) includes a stage subject surface (201) configured to receive a test subject (31), and a stage plate (112) bracing the stage subject surface (201). The stage plate (112) is under the stage subject surface (201). The test subject stage (110) further includes a heating element (202) adjacent to the stage subject surface (201), wherein the heating element (202) is configured to generate heat at the stage subject surface (201).