ELECTRONIC DEVICE INSPECTING APPARATUS

Provided is an electronic device inspecting apparatus that suppresses cost increase. A prober 10 is provided with a stage 11 on which a carrier C or a wafer W is placed. The stage 11 is provided with a stage cover 27 on which the carrier C is placed, a cooling unit 29 in contact with the stage cover...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJISAWA, Yoshinori, KASAI, Shigeru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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