METHOD AND SYSTEM FOR AT LEAST SUBSURFACE CHARACTERIZATION OF A SAMPLE

Method and system for performing characterization of a sample using an atomic force microscopy system. An actuation signal is provided to a photo-thermal actuator which is configured to excite the probe by means of an optical excitation beam incident on the cantilever. The probe is configured to be...

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Bibliographische Detailangaben
Hauptverfasser:	van Es, Maarten Hubertus, Sadeghian Marnani, Hamed, van Reijzen, Maarten Eduard
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	Method and system for performing characterization of a sample using an atomic force microscopy system. An actuation signal is provided to a photo-thermal actuator which is configured to excite the probe by means of an optical excitation beam incident on the cantilever. The probe is configured to be bendable by means of the optical excitation beam impinging on it. The actuation signal is configured to include at least one modulation frequency. The probe tip motion is monitored for determining at least a subsurface characterization data.