SYSTEM OF NON-ACOUSTIC SENSOR COMBINED WITH MEMS MICROPHONE

A system includes a pressure sensor combined with a MEMS microphone. The pressure sensor and the MEMS microphone arranged side by side are formed on a same substrate.

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Bibliographische Detailangaben
Hauptverfasser:	DOLLER, Andrew, ZHANG, Yujie, GEHL, Bernhard, HATIPOGLU, Gokhan, MEISEL, Daniel Christoph
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PUBLIC ADDRESS SYSTEMS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A system includes a pressure sensor combined with a MEMS microphone. The pressure sensor and the MEMS microphone arranged side by side are formed on a same substrate.