ELECTRON BEAM IRRADIATION APPARATUS
Provided is an electron beam irradiating device capable of emitting an electron beam (B) from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window (4). The electron beam exit window (4) includes: a grid (6); a window...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Provided is an electron beam irradiating device capable of emitting an electron beam (B) from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window (4). The electron beam exit window (4) includes: a grid (6); a window foil (9) allowing the electron beam to pass therethrough; and a frame-shaped pressing member (10) pressing the window foil (9) against the grid (6). The surface of the grid (6) has a groove section (81) having an annular shape. A metal gasket (11) is pressed between the groove section (81) and the window foil (9). |
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