OVENS COMPRISING DISCHARGE NOZZLE PLATE FOR DISTRIBUTION OF GAS THROUGH THE OVEN, AND METHOD TO OPERATE AN OVEN

Ovens, discharge nozzle plates for distribution of gas through an oven, and methods to operate an oven are disclosed. Example ovens include a heating system to heat gas, a substrate heating volume, and a plenum comprising a side wall having a plurality of passages formed therein, the plenum configur...

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Bibliographische Detailangaben
Hauptverfasser: MELGAARD, Hans L, VU, Phillip, RUF, Daniel M, BENSON, Matthew, GRAHAM, Robert Gerald, KRAGSETH, Rolf Douglas
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Ovens, discharge nozzle plates for distribution of gas through an oven, and methods to operate an oven are disclosed. Example ovens include a heating system to heat gas, a substrate heating volume, and a plenum comprising a side wall having a plurality of passages formed therein, the plenum configured to direct heated gas into the substrate heating volume from the plurality of passages, each of the plurality of passages formed in the plenum having a respective tapered cross- sectional shape.