VACUUM PUMP WHEREIN THE SUPPORT OF A ROLLING BEARING HAS AN ADJUSTABLE STIFFNESS AND/OR DAMPING PROPERTY

To reduce vibration, in particular, vibration of a rotor of a vacuum pump described at the beginning.SOLUTION: This invention relates to a vacuum pumps, in particular, a turbomolecular pump, and it has a housing and a rotor rotatably supported in the housing. The rotor can be driven to carry out a r...

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Bibliographische Detailangaben
Hauptverfasser:	Wirth, Adrian, Sieben, Daniel
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	To reduce vibration, in particular, vibration of a rotor of a vacuum pump described at the beginning.SOLUTION: This invention relates to a vacuum pumps, in particular, a turbomolecular pump, and it has a housing and a rotor rotatably supported in the housing. The rotor can be driven to carry out a rotation to carry process gas from an inlet to an outlet of a vacuum pump, at that time, the rotor is rotatably supported by roller bearings (260, 273, 275) on at least one side in the housing. Here, the strength and/or buffering action of the roller bearings (260, 273, 275) can be changed.SELECTED DRAWING: Figure 1