MEASUREMENT SYSTEM AND METHOD THEREOF

A measurement system (1) and method, which increases a degree of freedom for setting a measurement period and a transmission period of measurement values and has a high accuracy, are provided. The measurement system includes a control device (100) and a measurement device (300) measuring a measureme...

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Bibliographische Detailangaben
Hauptverfasser:	SUZUKI, Yuta, KONDO, Tomonori, SAWARAGI, Hiroshi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING TESTING
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Beschreibung
Zusammenfassung:	A measurement system (1) and method, which increases a degree of freedom for setting a measurement period and a transmission period of measurement values and has a high accuracy, are provided. The measurement system includes a control device (100) and a measurement device (300) measuring a measurement object (W) in a first period (Tb) and transmits measurement values obtained from the measurement device to the control device. The measurement device transmits the measurement values waiting to be transmitted and additional information including information of the number of the measurement values waiting to be transmitted to the control device using frames transmitted in a second period (Ta) that is longer than the first period. The control device generates time series data in which the measurement values are arranged in time series using the additional information.