PIEZOELECTRIC ELEMENT AND LIQUID EJECTING HEAD

Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. A...

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Hauptverfasser: MOROZUMI, Koichi, KOIKE, Harunobu
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. An atom concentration N(atm%) of potassium contained in grain boundaries of the crystal grains and an atom concentration N(atm%) of potassium contained in the crystal grains satisfy a relationship of 1.0 < N/N≤ 2.4.