COAXIAL CONNECTOR FEED-THROUGH FOR MULTI-LEVEL INTERCONNECTED SEMICONDUCTOR WAFERS

A semiconductor, silicon-on-oxide (SOI) structure having a silicon layer disposed on a bottom oxide (BOX) insulating layer. A deep trench isolation (DTI) material passes vertically through the silicon layer to the bottom oxide insulating layer. The deep trench isolation material has a lower permitti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TESHIBA, Mary, A, DRAB, John, J
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!