BONDING MATERIAL AND BONDING METHOD USING SAME

There are provided a bonding material, which is easily printed on a metal substrate, such as a copper substrate, and which can satisfactorily bond an Si chip to the metal substrate by preventing voids from being generated in a metal bonding layer and/or on the boundary between the metal bonding laye...

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Bibliographische Detailangaben
Hauptverfasser: KURITA, Satoru, FUJIMOTO, Hideyuki, KANASUGI, Minami, ENDOH, Keiichi
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:There are provided a bonding material, which is easily printed on a metal substrate, such as a copper substrate, and which can satisfactorily bond an Si chip to the metal substrate by preventing voids from being generated in a metal bonding layer and/or on the boundary between the metal bonding layer and the Si chip or metal copper substrate even if no pre-burning is carried out when the Si chip is bonded to the metal substrate, and a bonding method using the same. In a bonding material of a metal paste containing metal particles, a solvent and a dispersant, the metal particles containing first metal particles (small particles) having an average primary particle diameter of 1 to 40 nm, second metal particles (medium particles) having an average primary particle diameter of 41 to 110 nm, and third metal particles (large particles) having an average primary particle diameter of 120 nm to 10m, the weight percentages of the first, second and third metal particles being 1.4 to 49 % by weight, 36 % by weight or less, and 50 to 95 % by weight, respectively, with respect to the total 100 % by weight of the metal particles, and the weight ratio of the first metal particles to the second metal particles being 14/36 or more.