SUBSTRATE FOR DIGITAL X-RAY DETECTOR, DIGITAL X-RAY DETECTOR INCLUDING THE SAME AND MANUFACTURING METHOD THEREOF

A substrate for a digital X-ray detector (1) configured to sense an X-ray signal, a detector (1) including the same, and a manufacturing method thereof. According to an embodiment of the present disclosure, the substrate for an X-ray detector (1) includes an interlayer dielectric layer (125) arrange...

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Bibliographische Detailangaben
Hauptverfasser:	HAN, Younghun, CHANG, Youngyoung, JEON, Hyeji, YI, Youngjin, KIM, Jinpil, LEE, Hanseok
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A substrate for a digital X-ray detector (1) configured to sense an X-ray signal, a detector (1) including the same, and a manufacturing method thereof. According to an embodiment of the present disclosure, the substrate for an X-ray detector (1) includes an interlayer dielectric layer (125) arranged on a thin film transistor (110, 115, 120), a first passivation layer (135) and a second passivation layer (165) arranged on the interlayer dielectric layer (125), and a hydrogen blocking layer (210, 220) arranged on at least one of the first passivation layer (135) and the second passivation layer (165) in a transistor region corresponding to the thin film transistor.