METHOD OF SCANNING A SAMPLE WITH A LIGHT BEAM FOCUSED BY A MICROSCOPE OBJECTIVE LENS AND SCANNING LIGHT MICROSCOPE
Upstream a microscope objective lens (6), a polarization direction of a light beam is tilted with a first electro-optical deflector (8) between a first polarization direction with which the light beam (3) is deflected by a first polarization beam splitter (28) by a first angle and a second polarizat...
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Zusammenfassung: | Upstream a microscope objective lens (6), a polarization direction of a light beam is tilted with a first electro-optical deflector (8) between a first polarization direction with which the light beam (3) is deflected by a first polarization beam splitter (28) by a first angle and a second polarization direction with which it is deflected by a second angle. With a second electro-optical deflector (9), the polarization direction of the light beam (3) is tilted between a third polarization direction with which the light beam (3) is deflected by a second polarization beam splitter (28) by a third angle and a fourth polarization direction with which it is deflected by a fourth angle. In a first spatial direction, a second angle difference between the third and fourth angles is about twice a first angle difference between the first and second angles. |
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