SEAL RING STRUCTURE, SEMICONDUCTOR DIE, AND METHOD FOR DETECTING CRACKS ON SEMICONDUCTOR DIE

A seal ring structure is provided. The seal ring structure includes a seal ring on a semiconductor substrate. The seal ring includes a first interconnect element and a plurality of second interconnect elements. The first interconnect element is formed on a shallow trench isolation (STI) region and a...

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Hauptverfasser: PAN, Chung-We, FU, Ching-Hung, FAN, Kuo-Lung
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A seal ring structure is provided. The seal ring structure includes a seal ring on a semiconductor substrate. The seal ring includes a first interconnect element and a plurality of second interconnect elements. The first interconnect element is formed on a shallow trench isolation (STI) region and a first group of P-type doping regions over the semiconductor substrate. The second interconnect elements are formed below the first interconnect element and on a second group of P-type doping regions over the semiconductor substrate. The second interconnect elements are electrically separated from the first interconnect element, and the first and second groups of P-type doping regions are separated by the STI region.