EVAPORATOR, EVAPORATION COATING APPARATUS AND EVAPORATION COATING METHOD

An evaporator includes at least one feeding member and a heating member. Each feeding member is configured to transfer a source material in a transfer speed that is adjustable, and the heating member is configured to heat the source material transferred by the feeding member for evaporation to there...

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Bibliographische Detailangaben
1. Verfasser: ZHAO, Dejiang
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:An evaporator includes at least one feeding member and a heating member. Each feeding member is configured to transfer a source material in a transfer speed that is adjustable, and the heating member is configured to heat the source material transferred by the feeding member for evaporation to thereby generate a source material vapor. An evaporation coating apparatus further includes a coating chamber, an object holder, and a controller configured to control the transfer speed, wherein the evaporator and the object holder are both disposed inside the coating chamber, the object holder is configured to provide a platform for placing an object to be coated thereon, and the coating chamber is configured to provide an environment for the source material vapor vented out from the evaporator to attach to the object to thereby form a film of the source material onto the object.