MEMS NANOINDENTER CHIP WITH INDENTER PROBE AND REFERENCE PROBE

A MEMS-nanoindenter chip (1) for performing nanoindentation on a specimen (17) comprises:- An intender probe (3) joined with an indenter tip (9), the indenter tip (9) indenting into the specimen (17);- a reference probe (4) joined with a reference tip(11), the reference tip (11) touching the specime...

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Bibliographische Detailangaben
Hauptverfasser:	Beyeler, David, Muntwyler, Simon, Beyeler, Felix
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A MEMS-nanoindenter chip (1) for performing nanoindentation on a specimen (17) comprises:- An intender probe (3) joined with an indenter tip (9), the indenter tip (9) indenting into the specimen (17);- a reference probe (4) joined with a reference tip(11), the reference tip (11) touching the specimen and- sensing capabilities (2, 5, 6, 7, 8) to measure the position of the indenter probe (3) relative to the reference probe (4).This design of a MEMS-nanoindenter chip enables highly accurate measurements since the frame stiffness is not part of the measurement chain any more. Furthermore, the thermal drift during the nanoindentation is considerably reduced.