STRESS SENSOR

A stress sensor (100) is provided, including a substrate (102) and a bridge circuit (110) disposed thereon. The bridge circuit is coupled between an output node (Vout) and a ground node (GND). The bridge circuit (110) includes a first branch (112) and a second branch (114), the first having a first...

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1. Verfasser: ZANCHI, Alfio
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A stress sensor (100) is provided, including a substrate (102) and a bridge circuit (110) disposed thereon. The bridge circuit is coupled between an output node (Vout) and a ground node (GND). The bridge circuit (110) includes a first branch (112) and a second branch (114), the first having a first resistor, R1, having a first orientation and coupled to a tuning resistor, Rtune, at a first intermediate node (120). The second branch (114) includes a second resistor, R2, having a second orientation that is different from the first orientation, and coupled to a variable resistor, Rvar, at a second intermediate node (130). The bridge circuit (110) includes an amplifier (140) having a positive input terminal coupled to the second intermediate node (130), and a negative input terminal coupled to the first intermediate node (120). The amplifier (140) generates a voltage output at the output node (Vout) as a function of mechanical stress applied to the substrate (102). Rvar is non-linearly tunable based on the voltage output.