ION IMPLANTATION AMOUNT ADJUSTMENT APPARATUS AND METHOD, ION IMPLANTATION DEVICE, AND DETERMINATION METHOD

ION IMPLANTATION AMOUNT ADJUSTMENT APPARATUS AND METHOD, ION IMPLANTATION DEVICE, AND DETERMINATION METHOD

The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.

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Hauptverfasser: LI, Rujian, KANG, Dongwoo, FU, Yongyi, JING, Hao, LIU, Chenliang, LUO, Kang
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator LI, Rujian
KANG, Dongwoo
FU, Yongyi
JING, Hao
LIU, Chenliang
LUO, Kang
description The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title ION IMPLANTATION AMOUNT ADJUSTMENT APPARATUS AND METHOD, ION IMPLANTATION DEVICE, AND DETERMINATION METHOD
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