ION IMPLANTATION AMOUNT ADJUSTMENT APPARATUS AND METHOD, ION IMPLANTATION DEVICE, AND DETERMINATION METHOD

ION IMPLANTATION AMOUNT ADJUSTMENT APPARATUS AND METHOD, ION IMPLANTATION DEVICE, AND DETERMINATION METHOD

The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LI, Rujian, KANG, Dongwoo, FU, Yongyi, JING, Hao, LIU, Chenliang, LUO, Kang
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.