CHARGED PARTICLE BEAM DEVICE WITH A DETECTOR HOLDING STAND

CHARGED PARTICLE BEAM DEVICE WITH A DETECTOR HOLDING STAND

A charged particle beam device includes: a detection chamber flange 140; a detector 30; a detector holding stand 110 which holds the detector; a first shaft 120 which is slidably inserted into a guide hole 144 and connected to the detector holding stand, the guide hole being provided in the detectio...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: FUKUDA, Tomohisa
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A charged particle beam device includes: a detection chamber flange 140; a detector 30; a detector holding stand 110 which holds the detector; a first shaft 120 which is slidably inserted into a guide hole 144 and connected to the detector holding stand, the guide hole being provided in the detection chamber flange. The device may further include a first flange 170 which is attached to the detection chamber flange and has a spherical bearing; a second flange180 which is supported by the spherical bearing of the first flange; and a second shaft 122 which is slidably inserted into a guide hole 182 provided in the second flange and passes through a through-hole 146 in the detection chamber flange to be connected to the detector holding stand, each of the first shaft and the second shaft being provided with a flow channel 121,122 of a heat transfer medium for cooling or heating the detector.