PROCESSING SYSTEM AND METHOD FOR PROCESSING A FLEXIBLE SUBSTRATE

According to one aspect of the present disclosure, a processing system for processing a flexible substrate is provided. The processing system includes: a vacuum chamber; a transport system configured to guide the flexible substrate through the vacuum chamber along a substrate transportation path (P)...

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Bibliographische Detailangaben
Hauptverfasser: GERTMANN, Reiner, LOTZ, Hans-Georg
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:According to one aspect of the present disclosure, a processing system for processing a flexible substrate is provided. The processing system includes: a vacuum chamber; a transport system configured to guide the flexible substrate through the vacuum chamber along a substrate transportation path (P), wherein the transport system comprises a first substrate support and a second substrate support arranged at a distance from the first substrate support; and an inspection system for inspecting the flexible substrate. The inspection system includes: a light source configured to direct a light beam through a portion of the flexible substrate between the first substrate support and the second substrate support; and a light detector for detecting the light beam for conducting a transmission measurement of the flexible substrate, wherein at least one of the light source and the light detector is arranged in an environment configured for a second pressure level different from a first pressure level in the vacuum chamber. According to a further aspect, a deposition apparatus is provided. According to a further aspect, a method processing a flexible substrate is provided.