IMPROVED SIMS SPECTROMETRY TECHNIQUE USING FLUORINE CATALYSIS

A method of performing Secondary Ion Mass Spectrometry, comprising: - Providing a specimen on a specimen holder; - Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material; - Collecting ionized constituents of said ablated material in a mass...

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1. Verfasser: Mulders, Johannes Jacobus Lambertus
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description A method of performing Secondary Ion Mass Spectrometry, comprising: - Providing a specimen on a specimen holder; - Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material; - Collecting ionized constituents of said ablated material in a mass analyzer, and sorting them according to species, further comprising: - Providing a catalytic gas proximal said region of the specimen surface during said irradiation, said gas comprising fluorine atoms. Said catalytic gas may, for example, comprise a gas-phase hydrocarbon in which at least some hydrogen atoms have been substituted by fluorine atoms, e.g. a perfluoroalkane.
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language eng ; fre ; ger
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title IMPROVED SIMS SPECTROMETRY TECHNIQUE USING FLUORINE CATALYSIS
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