IMPROVED SIMS SPECTROMETRY TECHNIQUE USING FLUORINE CATALYSIS
A method of performing Secondary Ion Mass Spectrometry, comprising: - Providing a specimen on a specimen holder; - Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material; - Collecting ionized constituents of said ablated material in a mass...
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creator | Mulders, Johannes Jacobus Lambertus |
description | A method of performing Secondary Ion Mass Spectrometry, comprising:
- Providing a specimen on a specimen holder;
- Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material;
- Collecting ionized constituents of said ablated material in a mass analyzer, and sorting them according to species,
further comprising:
- Providing a catalytic gas proximal said region of the specimen surface during said irradiation, said gas comprising fluorine atoms.
Said catalytic gas may, for example, comprise a gas-phase hydrocarbon in which at least some hydrogen atoms have been substituted by fluorine atoms, e.g. a perfluoroalkane. |
format | Patent |
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- Providing a specimen on a specimen holder;
- Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material;
- Collecting ionized constituents of said ablated material in a mass analyzer, and sorting them according to species,
further comprising:
- Providing a catalytic gas proximal said region of the specimen surface during said irradiation, said gas comprising fluorine atoms.
Said catalytic gas may, for example, comprise a gas-phase hydrocarbon in which at least some hydrogen atoms have been substituted by fluorine atoms, e.g. a perfluoroalkane.</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190501&DB=EPODOC&CC=EP&NR=3477683A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190501&DB=EPODOC&CC=EP&NR=3477683A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Mulders, Johannes Jacobus Lambertus</creatorcontrib><title>IMPROVED SIMS SPECTROMETRY TECHNIQUE USING FLUORINE CATALYSIS</title><description>A method of performing Secondary Ion Mass Spectrometry, comprising:
- Providing a specimen on a specimen holder;
- Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material;
- Collecting ionized constituents of said ablated material in a mass analyzer, and sorting them according to species,
further comprising:
- Providing a catalytic gas proximal said region of the specimen surface during said irradiation, said gas comprising fluorine atoms.
Said catalytic gas may, for example, comprise a gas-phase hydrocarbon in which at least some hydrogen atoms have been substituted by fluorine atoms, e.g. a perfluoroalkane.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLD19A0I8g9zdVEI9vQNVggOcHUOCfL3dQ0JilQIcXX28PMMDHVVCA329HNXcPMJ9Q_y9HNVcHYMcfSJDPYM5mFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8a4Bxibm5mYWxo6GxkQoAQArpyoo</recordid><startdate>20190501</startdate><enddate>20190501</enddate><creator>Mulders, Johannes Jacobus Lambertus</creator><scope>EVB</scope></search><sort><creationdate>20190501</creationdate><title>IMPROVED SIMS SPECTROMETRY TECHNIQUE USING FLUORINE CATALYSIS</title><author>Mulders, Johannes Jacobus Lambertus</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3477683A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2019</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Mulders, Johannes Jacobus Lambertus</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Mulders, Johannes Jacobus Lambertus</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>IMPROVED SIMS SPECTROMETRY TECHNIQUE USING FLUORINE CATALYSIS</title><date>2019-05-01</date><risdate>2019</risdate><abstract>A method of performing Secondary Ion Mass Spectrometry, comprising:
- Providing a specimen on a specimen holder;
- Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material;
- Collecting ionized constituents of said ablated material in a mass analyzer, and sorting them according to species,
further comprising:
- Providing a catalytic gas proximal said region of the specimen surface during said irradiation, said gas comprising fluorine atoms.
Said catalytic gas may, for example, comprise a gas-phase hydrocarbon in which at least some hydrogen atoms have been substituted by fluorine atoms, e.g. a perfluoroalkane.</abstract><oa>free_for_read</oa></addata></record> |
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language | eng ; fre ; ger |
recordid | cdi_epo_espacenet_EP3477683A1 |
source | esp@cenet |
subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
title | IMPROVED SIMS SPECTROMETRY TECHNIQUE USING FLUORINE CATALYSIS |
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