LASER-ASSISTED HERMETIC ENCAPSULATION PROCESS AND PRODUCT THEREOF

Electronic device encapsulation process, assisted by a laser, for obtaining a sealed electronic device, wherein said process comprises: providing a first substrate and a second substrate, the second substrate being transparent in the emission wavelength of the laser, depositing an intermediate bondi...

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Bibliographische Detailangaben
Hauptverfasser: MAGALHÃES MENDES, Joaquim Gabriel, SANTOS MARTINS, Jorge Filipe, DOS SANTOS PINTO, Jorge Miguel, EMAMI, Seyedali, MAGALHÃES MENDES, Adélio Miguel, MADUREIRA ANDRADE, Luísa Manuela
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Electronic device encapsulation process, assisted by a laser, for obtaining a sealed electronic device, wherein said process comprises: providing a first substrate and a second substrate, the second substrate being transparent in the emission wavelength of the laser, depositing an intermediate bonding contour layer on one or both of the substrates; depositing electronic device components on one or both of the substrates; joining the first substrate and second substrate with the electronic device components in-between the substrates; using the laser to direct a laser beam onto the intermediate bonding contour layer with a predefined progressive scan pattern, such that the intermediate bonding contour layer is progressively melted and forms a seal, bonding the substrates together. Preferably, each linear laser pass overlaps longitudinally the previous and the following linear laser passes along said contour. Preferably, each linear laser pass is followed by a partial backtrack of the each linear laser pass, such that a part of the linear laser pass overlaps longitudinally the previous linear laser pass.