METHOD FOR OPTIMIZING THE LIFE CYCLE OF ROLLER BEARINGS OF A VACUUM PUMP
To complete a method of inexpensively exerting an operation of a vacuum pump while reducing maintenance and abrasion.SOLUTION: In a method of operating a vacuum pump, in particular, a turbo molecular pump, the vacuum pump has at least one inlet, at least one outlet, and a rotor having a rotor shaft,...
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Zusammenfassung: | To complete a method of inexpensively exerting an operation of a vacuum pump while reducing maintenance and abrasion.SOLUTION: In a method of operating a vacuum pump, in particular, a turbo molecular pump, the vacuum pump has at least one inlet, at least one outlet, and a rotor having a rotor shaft, the rotor shaft is rotatably supported by at least one supporting portion unit, here, at least one supporting portion unit has at least one roller supporting portion, here the rotor can be brought into a rotary motion state by a motor unit, and the motor unit is controlled and driven by a control unit so that the rotor is rotated at a minimum rotating speed in an operation mode free from load of the vacuum pump.SELECTED DRAWING: Figure 1 |
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