GRADIENT MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) MICROPHONE WITH VARYING HEIGHT ASSEMBLIES

In at least one embodiment, a micro-electro-mechanical systems (MEMS) microphone assembly is provided. The assembly comprises an enclosure, a micro-electro-mechanical systems (MEMS) transducer positioned within the enclosure, a substrate layer to support the MEMS transducer, and a first coupling lay...

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Bibliographische Detailangaben
Hauptverfasser: LI, Fengyuan, IRACLIANOS, Spiro, BAUMHAUER, John, REESE, Marc
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:In at least one embodiment, a micro-electro-mechanical systems (MEMS) microphone assembly is provided. The assembly comprises an enclosure, a micro-electro-mechanical systems (MEMS) transducer positioned within the enclosure, a substrate layer to support the MEMS transducer, and a first coupling layer surrounding at least a portion of the enclosure and being coupled to an application housing.