ACCRETION COLLECTING DEVICE AND INSPECTION SYSTEM

In order to detach substances stably from an inspection object, an adhering substance collecting device includes: ejection openings (n) configured to eject gas; a housing (B) on which the ejection openings (n) are provided; and supporting portions (H) which are installed on a surface of the housing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAGANO, Hisashi, NAMAI, Makoto, SUGIYAMA, Masuyuki, ITOU, Takahiro, KUMANO, Shun
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:In order to detach substances stably from an inspection object, an adhering substance collecting device includes: ejection openings (n) configured to eject gas; a housing (B) on which the ejection openings (n) are provided; and supporting portions (H) which are installed on a surface of the housing (B) on which the ejection openings (n) are provided, and have a prescribed height. The supporting portions (H) include protruded portions formed on the housing (B). The supporting portions (H) each have a cuboid shape, and are installed such that a distance therebetween becomes smaller toward a direction of a recovery opening that is configured to collect substances having been detached from an inspection object (C), from the gas.