LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, PIEZOELECTRIC DEVICE, AND METHOD OF MANUFACTURING LIQUID EJECTING HEAD
A liquid ejecting head including a nozzle that ejects a liquid, a flow path forming substrate on which a pressure generation chamber communicating with the nozzle and a first liquid supply chamber communicating with the pressure generation chamber are formed, a vibration plate that is formed on one...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A liquid ejecting head including a nozzle that ejects a liquid, a flow path forming substrate on which a pressure generation chamber communicating with the nozzle and a first liquid supply chamber communicating with the pressure generation chamber are formed, a vibration plate that is formed on one surface side of the flow path forming substrate, a piezoelectric element that is provided on the vibration plate at a position corresponding to the first pressure generation chamber, a first filter that is provided on the one surface side of the flow path forming substrate and in which a plurality of first liquid supply ports communicating with the first liquid supply chamber are formed, a protective substrate that is provided on the one surface side of the flow path forming substrate and provided with a second liquid supply chamber communicating with the first liquid supply chamber via the first liquid supply port, and a second filter that is provided on an upstream side of the first filter and provided with a plurality of second liquid supply ports, in which an inner diameter of the second liquid supply port is an inner diameter or larger of the first liquid supply port. |
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