SYSTEM AND METHOD FOR AUTOMATING USER INTERACTION FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

SYSTEM AND METHOD FOR AUTOMATING USER INTERACTION FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

A system includes an interface and a controller. The interface is configured to receive a state a substrate processing tool comprising a plurality of process modules configured to process a substrate. The controller is configured to correlate the state with an input previously received by the substr...

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Bibliographische Detailangaben
Hauptverfasser: UNTERGUGGENBERGER, Rainer, HUANG, Chung-Ho, CHAN, Henry, WONG, Vincent, HEMKER, David J
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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Beschreibung
Zusammenfassung:A system includes an interface and a controller. The interface is configured to receive a state a substrate processing tool comprising a plurality of process modules configured to process a substrate. The controller is configured to correlate the state with an input previously received by the substrate processing tool from the interface based on the state and to generate an output to control the substrate processing tool based on the correlation.