HIGH-PRECISION ADDITIVE FORMATION OF ELECTRICAL RESISTORS
Shown herein is a method of forming an electrical resistor (10) comprising the steps of: forming an electrically resistive layer (14) on a substrate (12); measuring an electrical resistance-related parameter of the electrically resistive layer (14) and determining a target length (L) of the electric...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Shown herein is a method of forming an electrical resistor (10) comprising the steps of: forming an electrically resistive layer (14) on a substrate (12);
measuring an electrical resistance-related parameter of the electrically resistive layer (14) and determining a target length (L) of the electrically resistive layer (14) corresponding to a target electrical resistance; and
forming first and second electrically conductive terminals (16a, 16b) contacting the electrically resistive layer (14), said first and second electrically conductive terminals (16a, 16b) being separated by a distance corresponding to the target length (L). In an alternative embodiment, an electrically isolating layer is formed on the electrically resistive layer having first and second ends, wherein the electrically isolating layer covers the electrically resistive layer in an overlap region extending between said and second ends, such that a length of the electrically resistive layer covered by the electrically isolating layer corresponds to the target length (L). First and second electrically conductive terminals are formed directly adjacent to the first and second ends of the electrically insulating layer, respectively. Corresponding arrangements for forming the electrical resistors are likewise disclosed. |
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