METHOD AND APPARATUS FOR VERIFICATION OF TDLAS SYSTEM OPERATION

Sensing of gas species characteristics within a process chamber includes selectively projecting a beam of a first select lasing frequency therethough. The beam is optically coupled to a detector to detect a process transmission spectrum having an absorption dip at a select lasing frequency caused by...

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Bibliographische Detailangaben
Hauptverfasser:	GILTNER, Dave, SAPPEY, Andrew D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING COMBUSTION APPARATUS COMBUSTION PROCESSES HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS REGULATING OR CONTROLLING COMBUSTION SEPARATION TESTING TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	Sensing of gas species characteristics within a process chamber includes selectively projecting a beam of a first select lasing frequency therethough. The beam is optically coupled to a detector to detect a process transmission spectrum having an absorption dip at a select lasing frequency caused by a gas species characteristic. The beam is selectively projected through a fiber Bragg grating which is formed in an optical fiber core to partially reflect at least a portion of the beam of the first select lasing frequency while passing a remainder of the beam. The remainder of the beam has an FBG transmission spectrum mimicking the absorption dip at or near the select lasing frequency caused by a gas species characteristic of interest. It is optically coupled the detector. Outputs of the detector are monitored to compare the FBG transmission spectrum to any process transmission spectrum produced in the process chamber.