METHODS AND APPARATUS FOR DETERMINING THE POSITION OF A SPOT OF RADIATION AND INSPECTION APPARATUS

A beam (542, 556) of soft x-ray (SXR) radiation is generated by focusing infrared (IR) radiation (540) at a source location so as to generate the SXR radiation (542) by higher harmonic generation in a gas cell (532). An illumination optical system (512) focuses the SXR radiation into a spot (S) of r...

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Bibliographische Detailangaben

Hauptverfasser:	LIN, Nan, VAN VOORST, Peter, Danny, TUKKER, Teunis, Willem
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING X-RAY TECHNIQUE
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