CHARACTERIZING A HEIGHT PROFILE OF A SAMPLE BY SIDE VIEW IMAGING

A scanning probe microscope (1), in particular an atomic force microscope, for analysing a sample (6) by moving a probe (11) and the sample (6) relative to one another, wherein the scanning probe microscope (1) comprises a detection unit (60) which comprises a side view camera (90) arranged and conf...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	BRANDNER, Markus, KOLLER, Daniel, GOMEZ-CASADO, Alberto, GODEC-SCHÖNBACHER, Martin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A scanning probe microscope (1), in particular an atomic force microscope, for analysing a sample (6) by moving a probe (11) and the sample (6) relative to one another, wherein the scanning probe microscope (1) comprises a detection unit (60) which comprises a side view camera (90) arranged and configured for detecting an image of the sample (6) in a substantially horizontal side view, and a determining unit (80) for determining information indicative of a profile of at least part of a surface of the sample (6) based on the detected image.