APPARATUS FOR PREPARING HETEROSTRUCTURES WITH REDUCED STRAIN BY RADIAL COMPRESSION
Apparatus and processes for preparing heterostructures with reduced strain by radial compression are disclosed. The heterostructures may include a semiconductor structure that conforms to a surface layer having a different crystal lattice constant than the structure to form a relatively low-defect h...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Apparatus and processes for preparing heterostructures with reduced strain by radial compression are disclosed. The heterostructures may include a semiconductor structure that conforms to a surface layer having a different crystal lattice constant than the structure to form a relatively low-defect heterostructure. |
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