PLASMA NOZZLE AND METHOD OF USING THE PLASMA NOZZLE

The invention relates to a plasma nozzle (1) for generating a plasma jet (5) comprising at least one electrode (7), a sheathing (9) concentrically surrounding the electrode (7), wherein a discharge chamber (11) is formed between the electrode (7) and the sheathing (9), and wherein the discharge cham...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VIÖL, Wolfgang, BELLMANN, Martin, HARMS, Marcus, OCHS, Christian
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The invention relates to a plasma nozzle (1) for generating a plasma jet (5) comprising at least one electrode (7), a sheathing (9) concentrically surrounding the electrode (7), wherein a discharge chamber (11) is formed between the electrode (7) and the sheathing (9), and wherein the discharge chamber (11) has an inlet opening (12) for a process gas and a nozzle opening (14) for emergence of the plasma jet (5) and the sheathing (9) contains or consists of a dielectric, a first counterelectrode (20) surrounding the discharge chamber (11) in a ring-shaped fashion in a first longitudinal section, wherein the first counterelectrode (20) is electrically insulated from the electrode (7) by the sheathing (9), and a second counterelectrode (16) is furthermore present, which surrounds the discharge chamber (11) in a ring-shaped fashion in a second longitudinal section, wherein the second counterelectrode (16) has a ring surface (18) widened in a plate-shaped fashion. The invention furthermore relates to a method for operating such a plasma nozzle.