DIFFERENTIAL PRESSURE DETECTION ELEMENT, FLOW RATE MEASUREMENT DEVICE, AND METHOD FOR MANUFACTURING DIFFERENTIAL PRESSURE DETECTION ELEMENT

A differential pressure detection element includes a support substrate 11 having an opening 111, a cantilever portion 12 supported in a cantilever manner by the support substrate 11 so as to protrude into the opening 111, a diffusion layer 13 including piezoresistive portions 131 and 132 provided at...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAYAMA, Naoki, ARAI, Hayato, SHIOIRI, Tatsuya
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A differential pressure detection element includes a support substrate 11 having an opening 111, a cantilever portion 12 supported in a cantilever manner by the support substrate 11 so as to protrude into the opening 111, a diffusion layer 13 including piezoresistive portions 131 and 132 provided at a fixed end 121 of the cantilever portion 12, a pair of wiring portions 16 and 17 electrically connected to the diffusion layer 13, a first insulating layer 14 covering the diffusion layer 13, and a second insulating layer 15 laid on the first insulating layer 14. A linear expansion coefficient of the first insulating layer 14 is smaller than a linear expansion coefficient of a material of which the cantilever portion 12 is composed, and a linear expansion coefficient of the second insulating layer 15 is larger than the linear expansion coefficient of the first insulating layer 14.