PIEZOELECTRIC INKJET DIE STACK

A piezoelectric inkjet die stack includes a circuit die (204) stacked on a substrate die (202); a piezoelectric actuator die (206) stacked on the circuit die (204); a cap die (208) stacked on the piezoelectric actuator die (206); wherein each die in succession from the circuit die (204) to the cap die (208) is narrower than a previous die, a first pressure chamber and a second pressure chamber (212) in the piezoelectric actuator die (206); an entrance manifold (220); a first exit manifold (222); and a second exit manifold. Each pressure chamber (212) includes an inlet port (214) and an outlet port (216) located in a floor (218) of the pressure chamber, the floor (218) of the pressure chamber (212) formed by a surface of the circuit die (204), and the inlet and outlet ports (214, 216) piercing the circuit die (204). The first and second pressure chambers (212) are in fluid communication with the entrance manifold 220 via their inlet ports (214). The first pressure chamber (212) is in fluid communication with the first exit manifold (222) via its outlet port (216), and the second pressure chamber (212) is in fluid communication with the second exit manifold (222) via its outlet port (216).