METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

A method comprises placing a semiconductor substrate on a first curved surface of a first bending tool, using a second bending tool with a second surface to apply pressure to the semiconductor substrate, thereby pressing the semiconductor substrate onto the first curved surface and bending the semic...

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Bibliographische Detailangaben
Hauptverfasser: Wedi, Andre, Stahlhut, Christian, Oeschler, Niels, Boenig, Guido
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A method comprises placing a semiconductor substrate on a first curved surface of a first bending tool, using a second bending tool with a second surface to apply pressure to the semiconductor substrate, thereby pressing the semiconductor substrate onto the first curved surface and bending the semiconductor substrate, and removing the bended semiconductor substrate from the first bending tool.