SYSTEM FOR GAS DISTRIBUTION AND MASS FLOW MEASUREMENT

A gas distribution system may include a gas mass flow sensor (206, 506) with a resistive element (230) configured to be heated, a thermally conductive shell (228, 528) surrounding the resistive element and heat-transfer control elements. The shell may include a leading surface (236, 536) oriented su...

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Bibliographische Detailangaben
Hauptverfasser: FACINELLI, William, KANG, Alan, SHEORAN, Yogendra Yogi, EARL, Andrew, ISOBE, Jun
Format: Patent
Sprache:eng ; fre ; ger
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