SYSTEM FOR GAS DISTRIBUTION AND MASS FLOW MEASUREMENT

A gas distribution system may include a gas mass flow sensor (206, 506) with a resistive element (230) configured to be heated, a thermally conductive shell (228, 528) surrounding the resistive element and heat-transfer control elements. The shell may include a leading surface (236, 536) oriented su...

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Bibliographische Detailangaben
Hauptverfasser: FACINELLI, William, KANG, Alan, SHEORAN, Yogendra Yogi, EARL, Andrew, ISOBE, Jun
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A gas distribution system may include a gas mass flow sensor (206, 506) with a resistive element (230) configured to be heated, a thermally conductive shell (228, 528) surrounding the resistive element and heat-transfer control elements. The shell may include a leading surface (236, 536) oriented substantially orthogonal to a direction of gas flow. At least one thermal insulator (244, 550) is positioned on a non-leading surface (240, 242, 540, 542, 552) of the shell to focus heat transfer from the resistive element through the leading surface of the shell, so that a rate of heat transfer is independent from the variations in flow configuration. Flow guidance elements (534) may additionally be positioned to provide a flow path focused on the leading surface of the shell.