CHEMICAL VAPOR DEPOSITION PROCESS FOR DEPOSITING A COATING
A chemical vapor deposition process for depositing a coating comprising silicon oxide and titanium oxide is provided. A coating formed by the chemical vapor deposition process is also provided.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A chemical vapor deposition process for depositing a coating comprising silicon oxide and titanium oxide is provided. A coating formed by the chemical vapor deposition process is also provided. |
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