PROCESS FOR SURFACE-COATING A COMPONENT UNDER VACUUM

Process for surface-coating a component (1) under vacuum by means of a vacuum coating plant (100), wherein the process comprises at least two of the following process steps: a) plasma activation of the surface of the component (1) to be coated in an evacuated plasma activation chamber (10) and/or b)...

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Bibliographische Detailangaben
Hauptverfasser:	ROCHOTZKI, Ralf, RATH, Egbert, HARTMANN, Frank, EICKENBUSCH, Martin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Process for surface-coating a component (1) under vacuum by means of a vacuum coating plant (100), wherein the process comprises at least two of the following process steps: a) plasma activation of the surface of the component (1) to be coated in an evacuated plasma activation chamber (10) and/or b) application of the coating in an evacuated coating chamber (11) and/or c) plasma polymerization to generate a protective layer on the applied coating in an evacuated plasma polymerization chamber (12). According to the invention the plasma activation chamber (10) and/or the coating chamber (11) and/or the plasma polymerization chamber (12) are vented and opened between at least two of said process steps and the component (1) is sent to the subsequent process step.