HEATER DEVICE FOR HEATING CRUCIBLE, OPERATION METHOD THEREFOR AND CRUCIBLE FOR CONTAINING AND HEATING MATERIAL TO BE EVAPORATED OR SUBLIMATED

The present invention provides a heater device (200) for heating a crucible (10, 100) and a method for operating the same, a crucible (10, 100) for heating a material to be evaporated or sublimated. The crucible (10, 100) has a bottom surface (11, 110) and at least one side surface (13, 131). The he...

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Bibliographische Detailangaben
Hauptverfasser:	DELAHOY, Alan E, XIA, Shengjiang, SHIN, Ken K, PENG, Shou, HEIMFARTH, Jan Peter, FU, Ganhua, SIEPCHEN, Bastian, RAU, Stefan
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention provides a heater device (200) for heating a crucible (10, 100) and a method for operating the same, a crucible (10, 100) for heating a material to be evaporated or sublimated. The crucible (10, 100) has a bottom surface (11, 110) and at least one side surface (13, 131). The heater device (200) comprises at least one resistance bottom heater (220, 220a, 220b) for the bottom surface (11, 110) of the crucible (10, 100) and at least one resistance side heater (210) for each side surface (13, 131) of the crucible (10, 100). At least one heater (220, 220a, 220b, 210) of the heaters (220, 220a, 220b, 210) comprises different heating sections adapted to introduce different amounts of heat into different portions of each surface of the crucible (10, 100). The crucible (10, 100) comprises at least one groove recess (140), the at least one groove recess (140) being adapted to receive a material to be evaporated or sublimated; at least one crucible wall (150, 150a-c), the at least one crucible wall (150, 150a-c) extending from a second surface (120) of the crucible (10, 100) to the inside of the groove recess (140); and at least one bottom recess (160), the at least one bottom recess (160) being formed inside the crucible wall (150, 150a-c). The bottom recess (160) is adapted to receive a wall heater.