VIBRATING BARREL POLISHING METHOD AND VIBRATING BARREL POLISHING SYSTEM

In one embodiment, a vibration barrel polishing method using a vibration barrel polishing system that includes a polishing tank having a bottom surface therein and a polishing jig capable of holding a workpiece and rotatable around a rotation axis is provided. This method includes a step of supporti...

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Bibliographische Detailangaben
Hauptverfasser: TANAHASHI Shigeru, OGIWARA Naoyuki
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:In one embodiment, a vibration barrel polishing method using a vibration barrel polishing system that includes a polishing tank having a bottom surface therein and a polishing jig capable of holding a workpiece and rotatable around a rotation axis is provided. This method includes a step of supporting the polishing jig in the polishing tank in a state in which a lowermost portion of the polishing jig is separated from the bottom surface, a clearance d between the lowermost portion of the polishing jig and the bottom surface being greater than or equal to a grain diameter of a polishing medium, a step of causing the polishing medium to flow in the polishing tank, and a step of rotating the polishing jig around the rotation axis in the state in which the lowermost portion of the polishing jig is separated from the bottom surface.