MICRO-FLUIDIC DEVICE

A micro-fluidic device. The device includes a semiconductor substrate attached to a fluid supply source. The substrate contains at least one vaporization heater, one or more bubble pumps for feeding fluid from the fluid supply source to the at least one vaporization heater, a fluid supply inlet from...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	BARKLEY, Lucas D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING METHODS OF STEAM GENERATION POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BYUSING INERTIA OF FLUID TO BE PUMPED PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SIPHONS STEAM BOILERS STEAM GENERATION WEAPONS
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Beschreibung
Zusammenfassung:	A micro-fluidic device. The device includes a semiconductor substrate attached to a fluid supply source. The substrate contains at least one vaporization heater, one or more bubble pumps for feeding fluid from the fluid supply source to the at least one vaporization heater, a fluid supply inlet from the fluid supply source in fluid flow communication with each of the one or more bubble pumps, and a vapor outlet in vapor flow communication with the at least one vaporization heater. The one or more bubble pumps each have a fluid flow path selected from a linear path, a spiral path, a circuitous path, and a combination thereof from the supply inlet to the at least one vaporization heater.