A POST CHEMICAL-MECHANICAL-POLISHING (POST-CMP) CLEANING COMPOSITION COMPRISING A SPECIFIC SULFUR-CONTAINING COMPOUND
A post chemical-mechanical-polishing (post-CMP) cleaning composition comprising: (A) is cysteine, glutathione, N-acetylcysteine, thiourea, (L) at least one oligomeric or polymeric polycarboxylic acid, and (C) water, wherein the post-CMP cleaning composition has a pH-value in the range of from 4 to n...
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| creator | Li, Yuzhuo Zhong, Mingije Venkataraman, Shyam Sundar |
| description | A post chemical-mechanical-polishing (post-CMP) cleaning composition comprising:
(A) is cysteine, glutathione, N-acetylcysteine, thiourea,
(L) at least one oligomeric or polymeric polycarboxylic acid, and (C) water,
wherein the post-CMP cleaning composition has a pH-value in the range of from 4 to not more than 7. The use of the composition for removing residues and contaminants from the surface of semiconductor substrates useful for manufacturing microelectronic devices. A process for manufacturing microelectronic devices from semiconductor substrates comprising the step of removing residues and contaminants from the surface of the semiconductor substrates by contacting them at least once with the post-CMP cleaning composition. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP3385363B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP3385363B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP3385363B13</originalsourceid><addsrcrecordid>eNqNiz0LwjAURbM4iPof3qhDBgmKa_pMzIN80aRzKRIn0UL1_9sWwdXpHs69d8neEmJIGdAoRygtdwqN9DPGYCkZ8hfYThuOLu4ArRrr0WFwo6VMwc9cU5q0hBQVkiaE1Fjd1ByDz5J-n8af12xx6-5D2XxzxUCrjIaX_tmWoe-u5VFerYpCnA7iKKq9-GPyAXO9OOU</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>A POST CHEMICAL-MECHANICAL-POLISHING (POST-CMP) CLEANING COMPOSITION COMPRISING A SPECIFIC SULFUR-CONTAINING COMPOUND</title><source>esp@cenet</source><creator>Li, Yuzhuo ; Zhong, Mingije ; Venkataraman, Shyam Sundar</creator><creatorcontrib>Li, Yuzhuo ; Zhong, Mingije ; Venkataraman, Shyam Sundar</creatorcontrib><description>A post chemical-mechanical-polishing (post-CMP) cleaning composition comprising:
(A) is cysteine, glutathione, N-acetylcysteine, thiourea,
(L) at least one oligomeric or polymeric polycarboxylic acid, and (C) water,
wherein the post-CMP cleaning composition has a pH-value in the range of from 4 to not more than 7. The use of the composition for removing residues and contaminants from the surface of semiconductor substrates useful for manufacturing microelectronic devices. A process for manufacturing microelectronic devices from semiconductor substrates comprising the step of removing residues and contaminants from the surface of the semiconductor substrates by contacting them at least once with the post-CMP cleaning composition.</description><language>eng ; fre ; ger</language><subject>ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES ; BASIC ELECTRIC ELEMENTS ; CANDLES ; CHEMISTRY ; DETERGENT COMPOSITIONS ; DETERGENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FATTY ACIDS THEREFROM ; METALLURGY ; RECOVERY OF GLYCEROL ; RESIN SOAPS ; SEMICONDUCTOR DEVICES ; SOAP OR SOAP-MAKING ; USE OF SINGLE SUBSTANCES AS DETERGENTS</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220316&DB=EPODOC&CC=EP&NR=3385363B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220316&DB=EPODOC&CC=EP&NR=3385363B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Li, Yuzhuo</creatorcontrib><creatorcontrib>Zhong, Mingije</creatorcontrib><creatorcontrib>Venkataraman, Shyam Sundar</creatorcontrib><title>A POST CHEMICAL-MECHANICAL-POLISHING (POST-CMP) CLEANING COMPOSITION COMPRISING A SPECIFIC SULFUR-CONTAINING COMPOUND</title><description>A post chemical-mechanical-polishing (post-CMP) cleaning composition comprising:
(A) is cysteine, glutathione, N-acetylcysteine, thiourea,
(L) at least one oligomeric or polymeric polycarboxylic acid, and (C) water,
wherein the post-CMP cleaning composition has a pH-value in the range of from 4 to not more than 7. The use of the composition for removing residues and contaminants from the surface of semiconductor substrates useful for manufacturing microelectronic devices. A process for manufacturing microelectronic devices from semiconductor substrates comprising the step of removing residues and contaminants from the surface of the semiconductor substrates by contacting them at least once with the post-CMP cleaning composition.</description><subject>ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CANDLES</subject><subject>CHEMISTRY</subject><subject>DETERGENT COMPOSITIONS</subject><subject>DETERGENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FATTY ACIDS THEREFROM</subject><subject>METALLURGY</subject><subject>RECOVERY OF GLYCEROL</subject><subject>RESIN SOAPS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SOAP OR SOAP-MAKING</subject><subject>USE OF SINGLE SUBSTANCES AS DETERGENTS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNiz0LwjAURbM4iPof3qhDBgmKa_pMzIN80aRzKRIn0UL1_9sWwdXpHs69d8neEmJIGdAoRygtdwqN9DPGYCkZ8hfYThuOLu4ArRrr0WFwo6VMwc9cU5q0hBQVkiaE1Fjd1ByDz5J-n8af12xx6-5D2XxzxUCrjIaX_tmWoe-u5VFerYpCnA7iKKq9-GPyAXO9OOU</recordid><startdate>20220316</startdate><enddate>20220316</enddate><creator>Li, Yuzhuo</creator><creator>Zhong, Mingije</creator><creator>Venkataraman, Shyam Sundar</creator><scope>EVB</scope></search><sort><creationdate>20220316</creationdate><title>A POST CHEMICAL-MECHANICAL-POLISHING (POST-CMP) CLEANING COMPOSITION COMPRISING A SPECIFIC SULFUR-CONTAINING COMPOUND</title><author>Li, Yuzhuo ; Zhong, Mingije ; Venkataraman, Shyam Sundar</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3385363B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2022</creationdate><topic>ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CANDLES</topic><topic>CHEMISTRY</topic><topic>DETERGENT COMPOSITIONS</topic><topic>DETERGENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FATTY ACIDS THEREFROM</topic><topic>METALLURGY</topic><topic>RECOVERY OF GLYCEROL</topic><topic>RESIN SOAPS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SOAP OR SOAP-MAKING</topic><topic>USE OF SINGLE SUBSTANCES AS DETERGENTS</topic><toplevel>online_resources</toplevel><creatorcontrib>Li, Yuzhuo</creatorcontrib><creatorcontrib>Zhong, Mingije</creatorcontrib><creatorcontrib>Venkataraman, Shyam Sundar</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Li, Yuzhuo</au><au>Zhong, Mingije</au><au>Venkataraman, Shyam Sundar</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A POST CHEMICAL-MECHANICAL-POLISHING (POST-CMP) CLEANING COMPOSITION COMPRISING A SPECIFIC SULFUR-CONTAINING COMPOUND</title><date>2022-03-16</date><risdate>2022</risdate><abstract>A post chemical-mechanical-polishing (post-CMP) cleaning composition comprising:
(A) is cysteine, glutathione, N-acetylcysteine, thiourea,
(L) at least one oligomeric or polymeric polycarboxylic acid, and (C) water,
wherein the post-CMP cleaning composition has a pH-value in the range of from 4 to not more than 7. The use of the composition for removing residues and contaminants from the surface of semiconductor substrates useful for manufacturing microelectronic devices. A process for manufacturing microelectronic devices from semiconductor substrates comprising the step of removing residues and contaminants from the surface of the semiconductor substrates by contacting them at least once with the post-CMP cleaning composition.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES BASIC ELECTRIC ELEMENTS CANDLES CHEMISTRY DETERGENT COMPOSITIONS DETERGENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FATTY ACIDS THEREFROM METALLURGY RECOVERY OF GLYCEROL RESIN SOAPS SEMICONDUCTOR DEVICES SOAP OR SOAP-MAKING USE OF SINGLE SUBSTANCES AS DETERGENTS |
| title | A POST CHEMICAL-MECHANICAL-POLISHING (POST-CMP) CLEANING COMPOSITION COMPRISING A SPECIFIC SULFUR-CONTAINING COMPOUND |
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